Quartz Glass Diffusion Tube for Solar Cell Silicon Wafer (JC/T 2066--2011)

1 Scope

This standard specifies the terms and definitions, markings, materials, requirements, test methods, inspection rules and signs, packaging, transportation and storage of quartz glass diffusion tubes for solar cell silicon wafers (hereinafter referred to as quartz glass diffusion tubes).

This standard applies to transparent quartz glass tubes with an outer diameter greater than or equal to 200mm and a length greater than 2000mm for the solar cell wafer diffusion process.

2 normative references

The following documents are indispensable for the application of this document. For all references to the attention period, only the dated version applies to this document. For undated references, the latest version (including all amendments) applies to this document.

JC/T 181—2011 Transparent Quartz Glass Device for Semiconductors

JC/T 597-20l transparent quartz glass tube for semiconductor

3 Terms and Definitions

The terms and definitions defined by JC/T 597-2011 and the following apply to this document.

3.1

Port flatness flatness of tnbeend

The flatness of the quartz glass diffuser port.

3.2

Face perpendicularity perpendicularity oftubeend

The degree of verticality of the end face of the quartz glass diffusion tube and the axial direction.

4 mark

4.1 Marking method

The quartz glass diffuser is marked in the order of product name, product specification, production lot number and standard number.

4.2 Tag Examples

Example: In accordance with JC/T 2066-2011, the outer diameter is 330mm, the length is 2160mm, and the quartz glass diffusion tube for solar cell wafers with lot number 20091018 is marked as:

5 materials

Transparent quartz tubes used for quartz glass diffusion tubes should meet the requirements of the corresponding T-class products in JC/T 597-2011.

Other materials used for quartz glass diffusion tubes should comply with JC/T 181-2011 and the requirements agreed upon between supply and demand parties.

6 requirements

6.1 Specifications and Dimensional Deviation

6.1.1 The size of the quartz glass diffuser is agreed upon by both parties.

6.1.2 The deviation of the outer diameter, wall thickness deviation, ellipticity, eccentricity and bending of the quartz glass diffuser shall be in accordance with Table 1.

6.3 stress

Shiyan glass diffusion tube is only allowed to show uniform purple color in the stress meter

7 test methods

7.1 Specifications and Dimensional Deviation

According to the provisions of 6.1 of JC/T 597-2011.

7.2 Port Flatness

A quartz glass reference plane with a flatness of 0.01 m was placed in close contact with the port of the quartz glass diffusion tube, and a feeler with an accuracy of 0.01 m was used to measure the maximum clearance between the reference plane and the port.

7.3 Face verticality

Place the quartz glass diffuser tube on a platform with an accuracy of not less than 2 stages. Use a 400mm square bar with an accuracy of 1st level. Close to the platform while gently touching the end of the quartz glass diffuser tube on the other side, gently turn the quartz glass. Diffusion tube, find the maximum gap between the highest point of the pipe end face and the square ruler, measure the maximum gap with a feeler gauge with an accuracy of 0.01mm.

7.4 Appearance quality

Under natural light, use visual inspection. The defect size is measured with a vernier caliper with an accuracy of not less than 0.02 mm.

7.5 stress

Place the quartz glass diffuser tube in the field of view of the stress meter with a purple-red interference color. Move or rotate the specimen so that the brightest interferometric color appears in the field of view. Observe the color of each part of the specimen.

8 inspection rules

8.1 Inspection Project

According to the requirements of Chapter 6.

8.2 Decision Rules

Each quartz glass diffusion tube must meet all the requirements of Chapter 6. If one of the quartz glass diffusion tubes fails, it is judged as unacceptable.

9 signs, packaging, transportation and storage

9.1 mark

Each quartz glass diffuser tube should be accompanied by a product certificate at the time of shipment. The product name, specification, production date (or production lot number), standard code, inspector number, manufacturer name, or trademark are marked on the certificate.

9.2 Packaging

Quartz glass diffusion tubes should be packaged in a clean environment. The packaging should meet the requirements of protection and dust prevention to avoid scratching, damage, and contamination of the product. If packaging is required after single-piece packaging, the packaging shall also meet the protection and dust-proof requirements. Product packaging with the box into the product certification and packing list. Packing list should indicate quantity or weight, packing date and so on.

The packaging box should have storage and transportation logos, such as "glass products", "careful light", "do not invert", "moisture proof" and other words and graphics.

9.3 Transportation

In the process of transportation and handling, care should be taken with care and precautions should be taken.

9.4 Storage

The product should be stored in a clean, dry room without harmful gases.

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